Evaluation of Bulk and SOI FeFET Architecture for Non-Volatile Memory Applications
The stress induced by the capping electrode FINE GREY SEA SALT is critical to stabilizing the ferroelectric phase in Si-doped HfO2 which is being actively explored for embedded non-volatile memory applications.While TiN is commonly used as the electrode of choice owing to its thermodynamic stability with HfO2, its work function (WF) (=4.8eV) result